|hAʯӢƷ˾λڴʯӢƷɢ-BƸЖ|h|hN(yn)SʯӢVأƷλஔ(dng)ߣ_(d)99.9%ɴ,|hʯӢԼˮƷʯӢɰʯӢʯӢƷ,ڴꑵЈ~ռ95%
ҹ˾2000ʯӢƷa(chn)н(jng)λҪa(chn)ƷʯӢܡʯӢpʯӢʯӢܡʯӢˮʯӢƬʯӢh(hun)ʯӢ塢ʯӢxNʯӢʯӢʯӢܡoʯӢ⾀гʯӢ⾀ԼNɫʯӢܵʯӢƷ
ʯӢܰNҎ(gu)⡢UV⾀ʯӢܼpʯӢֱ2-180mmں0.5-8mmL10-3000mmBʯӢܡÓuV⾀oͨB۹SiO2_(d)99.6%γߴW(xu)(wn)᷀(wn)׃ԺͿ܃(yu)W(xu)^_(d)93%Óuu10ppm£(jng)^Óuu_(d)5ppm£mڸ߉cuȵua(chn)Ʒ;֮¹ˇa(chn)Ʒıڰl(f)ӟh(yun)tܵV⾀ܞVVЌwк190-320nmL⾀mڭh(hun)ԴocV ⾀෴^253.7nmҲL⾀ǟo⾀ҪϣVڽеˮ̎ʳƷl(wi)Ț;
ʯӢƷʯӢʯӢݚʯӢʯӢˮסʯӢƬʯӢ塢ʯӢh(hun)ʯӢ塢ʯӢxNʯӢʯӢܵȮʯӢܺ͵ͳʯӢ⾀NɫͲʯӢʯӢֱ8-120mm֮gІ_ڡp_A^ƽ^κ͔U(ku)s߅ĥɰȼӹߜgԺüc,VʹˮO(sh)ӟˮ̎uȮa(chn)Ʒͭh(hun)l(wi)I(lng)ʯӢݚҎ(gu)8-180mmΠ(j)͑ҪݚϿԽë(x)M(jn)Ś⣬ߜԺҪJCJDH1-H7_߉cuȮa(chn)Ʒ;
ʯӢˮҪӡˢͰbӹI(y)---- UV̻, UV̻һNʮֿɿȡ՚C(j)\g(sh)Ĺ̻g(sh)ӡˢͰbӹI(y)ѽ(jng)õV(yng)ͳʯӢ⾀ϵÇ(ni)M(jn)g(sh)_l(f)®a(chn)ƷЧ(qing)Y(ji)(gu)·fLrܮa(chn)L253.7nmȏ(qing)⾀ݗ䏊(qing)100W/cm2,(x)ÓǺ(DNA)^(qing)Ɖã@ĚЧ,l(wi)g(sh)Ҏ(gu)ָ(bio)Ҫ
҂Įa(chn)Ʒ|(zh)_(d)(bio)˳Ҏ(gu)ҿԞ͑M(jn)ЁDϼӹ